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Measurement services
Fourier-transform infrared spectroscopy(FTIR)
No.：
Specifications
| BRUKER INVENIO-S | |
| Wavelength range | 8000~340 cm^-1 |
| Resolution | Better than 0.4 cm^-1 |
| Wavenumber accuracy | <0.01cm-1@1,554cm^-1 |
| Wavenumber precision | Repeatability < 0.0005cm^-1@1,554cm^-1 (standard deviation of 10 repeated measurements) |
| Photometric accuracy | Better than 0.1% T |
| Sample size | 6” ~8 “ wafer (PIKE MapplR) |
| Test items | 1. Single point measurement 2. Mapping measurement |