製品情報
測定サービス
Thin Film Analyzer(ACMS)
部品番号：
製品仕様
| ACMS | |
| Film thickness range | 10 nm-25 um |
| Wavelength range | 450-1000 nm,1000-1600 nm |
| spectrum resolution | ~1 nm |
| spectrum repeatability | <0.03% |
| Thickness error in multilayer film | <2nm |
| Thickness precision in multilayer film | <0.1 nm |
| refractive index error | <0.1 |
| Sample size | 1"~8" |
| Test items |
Single layer optical properties of Organic polymer materials, Metal, Oxide, Nitride, Semiconductors, Dielectric material 1. Refractive index(n) 2. Extinction coefficient(k) 3. Film thickness(d) 4. Spectrum of Transmittance 5. Spectrum of Reflectivity |