APOGEE OPTOCOM Co.,Ltd

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White Light Interferometer

部品番号:

製品仕様

Zygo ZegagePlus
Illumination Single LED
Max Scan Range (Step Height) 20 mm
Z-Axis  100 mm Travel
Roughness Repeatability 0.15nm
Step Heights 3% Accuracy
Step Height Repeatability  < 0.3% 1 sigma
Sample size Radius of Curvature 5.5mm(W) x 5.5 mm(L) x 20mm(H)(max),
Suggest , 1.5mm(W) x 1.5 mm(L) x 20mm(H)
Roughness 8”T=20mm(max) ,Single point measurement
Step Height 8”T=20mm(max) ,Single point measurement
Field of View
(FOV)
2.75x 6.05 x 6.05 mm
10x 1.68 x 1.68 mm
50x 0.34 x 0.34 mm
Test items 1. Radius of Curvature
2. Roughness
3. Step Height
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