製品情報
測定サービス
White Light Interferometer
部品番号：
製品仕様
| Zygo ZegagePlus | ||
| Illumination | Single LED | |
| Max Scan Range (Step Height) | 20 mm | |
| Z-Axis | 100 mm Travel | |
| Roughness Repeatability | 0.15nm | |
| Step Heights | 3% Accuracy | |
| Step Height Repeatability | < 0.3% 1 sigma | |
| Sample size | Radius of Curvature | 5.5mm(W) x 5.5 mm(L) x 20mm(H)(max), Suggest , 1.5mm(W) x 1.5 mm(L) x 20mm(H) |
| Roughness | 8”T=20mm(max) ,Single point measurement | |
| Step Height | 8”T=20mm(max) ,Single point measurement | |
| Field of View (FOV) |
2.75x | 6.05 x 6.05 mm |
| 10x | 1.68 x 1.68 mm | |
| 50x | 0.34 x 0.34 mm | |
| Test items | 1. Radius of Curvature 2. Roughness 3. Step Height |
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